
Nano
Electronics
By utilizing thermal stimulus rather than energetic particles such as electrons or photons, sensitive electronic devices comprising 2D materials and transition metal dichalcogenides (TMDs) remain in an unharmed state. Grayscale lithography capabilities with sub-nanometer resolution allow for unique manipulation of 2D materials for electronic applications.

Courtesy of Yannik Glauser, ETH Zürich
Nano
Photonics
Manipulation of light often requires sub-wavelength patterning capabilities in all three dimensions. With the NanoFrazor tool and the Closed Loop Lithography (CLL) capability, new landscapes such as optical Fourier surfaces are made into possible. Large area requirements for nanophotonic applications are now also possible with the Decapede module where ten t-SPL cantilevers operate in parallel for increased throughput with sub-30nm resolution.

Courtesy of Yannik Glauser, ETH Zürich

Image courtesy of Prof. Dr. Elisa Riedo, NYU
Nano
Biomaterials
By using a thermal stimulus, thermal scanning probe lithography (t-SPL) allows for the manipulation of chemically sensitive surfaces with sub-30nm resolution capabilities to unlock unique chemical gradients. In addition, biomimicry by grayscale patterning on polymers and other biocompatible materials open the path to exciting bionanotechnology.

Shani, Chaaban, et. al. 2024 Nanotechnology
Quantum
Electronics
Accessing qubits and making these remarkable devices communicate with the outside world requires the fabrication of high-resolution electrodes as well as larger structures such as electrical wiring and contact pads. With the NanoFrazor NextGeneration tool with Mix & Match patterning capabilities to combine the best of t-SPL and DLS all within one tool with one software and one film stack.

Shani, Chaaban, et. al. 2024 Nanotechnology

Courtesy of Prof. Dr. Edoardo Albisetti, Politecnico di Milano
Spintronics
Manipulating the spin orientations of electrons in thin films by thermally adjusting the crystal structure at sub-100 nm resolution is possible with the NanoFrazor. Thermal stimulus from the t-SPL module can be used for the high-temperature manipulation for spintronic applications, as well as local changes to magnetic states and even triggering of phase transitions.

Courtesy of Dr. Xia Liu and Berke Erbas, EPFL
Materials
Science
Manipulating or modification of materials at the nanoscale by thermal energy allows for the removal, conversion, and/or addition of matter at the nanoscale. By having access to high temperatures and GPa pressures, the world of material science possibilities is limited only by one’s imagination. From direct sublimation of organic materials to the nanocutting of transition metal dichalcogenides, NanoFrazor enables science at the cutting edge.

Courtesy of Dr. Xia Liu and Berke Erbas, EPFL
Join our
community
«I believe that Thermal Scanning Probe Lithography is the nanofabrication technique of the future. The Nanofrazor offers better resolution than EBL, no need for high vacuum or a cleanroom, and in-situ imaging, which means no markers needed. In our group we particularly appreciate the Nanofrazor for chemical nanopatterning in biomedical research.»
– Prof. Dr. Elisa Riedo, NYU Tandon School of Engineering
«I really appreciate the versatility of the NanoFrazor, which allows us to seamlessly mix and match thermal nanolithography and laser writing on a variety of different materials. Also the possibility to perform in-situ imaging with nanoscale resolution provides direct feedback on the patterning and alignment, which greatly streamlines the patterning optimization process.»
– Prof. Dr. Edoardo Albisetti, Politecnico di Milano
«NanoFrazor was a game changer for my research group. The compactness of the system allowed us to pack fabrication facilities into gloveboxes, allowing a fully inert process for air-sensitive materials and opening research opportunities. Beyond the obvious capabilities in nanolithography, we were also pleasantly surprised at the ‘non-lithography’ potential of the instrument.»
– Dr. Chit Siong Aaron Lau, Institute of Materials Research and Engineering, Singapore
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